Koda in sestava mešanega plina Silane

The code name of silane gas mixture is SiH4, which is directly derived from the chemical element symbol of silane molecule. Silane, also known as monosilane or silicon tetrahydride, is a colorless, flammable gas. Silane gas mixture is a high-purity gas mixture formed by mixing silane with other gases, such as hydrogen and nitrogen, V določenem deležu . ima ta plinska mešanica široko paleto vrednosti uporabe v industrijski proizvodnji .